Bakshi, Vivek
Description from Knovel:
"This comprehensive volume is comprised of contributions from the world's leading EUVL researchers and provides all of the critical information needed by practitioners and those wanting an introduction to extreme ultraviolet lithography. "
EUV Sources for Lithography
Bakshi, Vivek
Description from Knovel:
"This volume on EUV source technology is intended to meet the needs of both practitioners and readers seeking an introduction to the subject."
More on Vivek Bakshi: http://www.euvlitho.com/2010/Vivek%20Bakshi%20Short%20Biography.pdf
http://spie.org/app/profiles/viewer.aspx?profile=GWBFFW
Handbook of Nanotechnology, Nanometer Structures - Theory, Modeling, and Simulation
Lakhtakia, Akhlesh
Description from Knovel:
"This volume is a researcher's reference handbook to the many aspects of nanometer structures."
More on Akhlesh Lakhtakia: http://www.esm.psu.edu/~axl4/
Lithography Process Control
Levinson, Harry J.
Description from Knovel:
"This book is a self-contained tutorial covering lithography process control at several levels, that works both as an introduction to the technology and as a reference for the experienced lithographer."
More from Harry J. Levinson: http://spie.org/x17408.xml
http://www.phys.utk.edu/WPWebSite/Student%20Pages/ewp_prevstudents_levinson.htm
Optical Scattering - Measurement and Analysis (2nd Edition)
Stover, John C.
Description from Knovel:
"The intent of this book is to introduce engineers and physicists to scatter fundamentals for theory, problems, and solutions, as well as acquaint them with a diverse set of background subjects and literature."
More from John C. Stover: http://www.thescatterworks.com/content/view/27/67/
Carbon Nanotechnology - Recent Developments in Chemistry, Physics, Materials Science and Device Applications
Dai, Liming
Description from Knovel:
"This book will be very useful not only to experienced scientists and engineers who wish to broaden their knowledge of the wide-ranging nanotechnology and/or to develop practical devices, but also to graduate and senior undergraduate students who look to make their mark in this field of the future."
More from Liming Dai: http://academic.udayton.edu/limingdai/
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